Merging lithography processes for gate patterning

ABSTRACT

Methods for fabricating devices on a die, and devices on a die. A method may include patterning a first region to create a first gate having a first gate length and a first contacted polysilicon pitch (CPP) with a first process. The first CPP is smaller than a single pattern lithographic limit. The method also includes patterning the first region to create a second gate having a second gate length or a second CPP with a second process. The second CPP is smaller than the single pattern lithographic limit. The second gate length is different than the first gate length.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims the benefit under 35 U.S.C. §119(e) to U.S.Provisional Patent Application No. 61/908,007 entitled “MERGINGLITHOGRAPHY PROCESSES FOR GATE PATTERNING,” filed on Nov. 22, 2013, thedisclosure of which is expressly incorporated by reference herein in itsentirety.

BACKGROUND

1. Field

Aspects of the present disclosure relate to semiconductor devices, andmore particularly to reducing gate length and spacing in field effecttransistor (FET) structures.

2. Background

As semiconductor device sizes decrease, the ability to create thepatterns for the devices becomes more difficult. For 10 nanometer (nm)contacted polysilicon (PO) pitch (CPP) devices, multiple patterningsteps may be used to attain the device size. For example, a related artmethod is known as litho-etch litho-etch (LELE), which uses a largerpitch pattern that is interleaved or intertwined to achieve smallerpitch sizes. Nevertheless, LELE is still limited by a larger line edgeroughness (LER), a larger gate-gate space variation, and a largercritical dimension variation.

Another related art method is self-aligned double patterning (SADP) thatuses a spacer deposited on a mandrel to define the gate length (Lg).Although SADP has better critical dimension uniformity than LELE,additional masks are used to produce different gate lengths in aSADP-produced device. This limits the usefulness of the SADP process forlarger integrated circuits.

SUMMARY

A method for fabricating devices on a die may include patterning a firstregion to create a first gate having a first gate length and a firstcontacted polysilicon pitch (CPP) with a first process. The first CPP issmaller than a single pattern lithographic limit. The method alsoincludes patterning the first region to create a second gate having asecond gate length or a second CPP with a second process. The second CPPis smaller than the single pattern lithographic limit. The second gatelength is different than the first gate length.

An apparatus may include a first gate length device having a first gatelength and a first contacted polysilicon pitch (CPP) in a first region.The first CPP is smaller than a single pattern lithographic limit. Theapparatus also includes at least one second gate length device in thefirst region having a second gate length or a second CPP. The second CPPis smaller than the single pattern lithographic limit. The second gatelength being different than the first gate length.

An apparatus may include first means for selectively conducting currenthaving a first gate length and a first contacted polysilicon pitch (CPP)in a first region. The first CPP is smaller than a single patternlithographic limit. The apparatus also includes second means forselectively conducting current having at least one second gate lengthdevice having a second gate length or a second CPP. The second CPP issmaller than the single pattern lithographic limit. The second gatelength being different than the first gate length.

This has outlined, rather broadly, the features and technical advantagesof the present disclosure in order that the detailed description thatfollows may be better understood. Additional features and advantages ofthe disclosure will be described below. It should be appreciated bythose skilled in the art that this disclosure may be readily utilized asa basis for modifying or designing other structures for carrying out thesame purposes of the present disclosure. It should also be realized bythose skilled in the art that such equivalent constructions do notdepart from the teachings of the disclosure as set forth in the appendedclaims. The novel features, which are believed to be characteristic ofthe disclosure, both as to its organization and method of operation,together with further objects and advantages, will be better understoodfrom the following description when considered in connection with theaccompanying figures. It is to be expressly understood, however, thateach of the figures is provided for the purpose of illustration anddescription only and is not intended as a definition of the limits ofthe present disclosure.

BRIEF DESCRIPTION OF THE DRAWINGS

For a more complete understanding of the present disclosure, referenceis now made to the following description taken in conjunction with theaccompanying drawings.

FIGS. 1A-1J illustrate side views of a semiconductor device inaccordance with one or more aspects of the present disclosure.

FIGS. 2A-2M illustrate a process to fabricate a semiconductor device inaccordance with one or more aspects of the present disclosure.

FIGS. 3A-3C illustrate side views of a semiconductor device inaccordance with one or more aspects of the present disclosure.

FIG. 4 is a process flow diagram illustrating a method for fabricating adevice according to an aspect of the present disclosure.

FIG. 5 is a block diagram showing an exemplary wireless communicationsystem in which an aspect of the disclosure may be advantageouslyemployed.

FIG. 6 is a block diagram illustrating a design workstation used forcircuit, layout, and logic design of a semiconductor component inaccordance with an aspect of the present disclosure.

DETAILED DESCRIPTION

The detailed description set forth below, in connection with theappended drawings, is intended as a description of variousconfigurations and is not intended to represent the only configurationsin which the concepts described herein may be practiced. The detaileddescription includes specific details for the purpose of providing athorough understanding of the various concepts. It will be apparent tothose skilled in the art, however, that these concepts may be practicedwithout these specific details. In some instances, well-known structuresand components are shown in block diagram form in order to avoidobscuring such concepts. As described herein, the use of the term“and/or” is intended to represent an “inclusive OR”, and the use of theterm “or” is intended to represent an “exclusive OR”.

A ten (10) nanometer (nm) contacted polysilicon (PO) pitch (CPP)geometry may use a sixty (64) nm base geometry for patterning of thedevices. To create this size of a base geometry in a device, 193interleaved double patterning is often used. Two methods can create thebase geometry in the device. The first lithography process, litho-etchlitho-etch (LELE), uses a one hundred twenty-eight (128) nm pitchpattern that is interleaved (e.g., overlaid) upon itself to reduce thesize of the 128 nm features to the 64 nm features. By overlapping themask, the 128 nm features can be cut in half to get to the 64 nm baseCPP. The second lithography process, self-aligned double patterning(SADP), uses a spacer deposited to a dummy mandrel pattern to define thegate length (Lg). This is similar to creating a fin structure in aFinFET device.

One aspect of the present disclosure merges SADP and LELE to allow formultiple gate lengths within a circuit or device. The use of SADPprovides tighter critical dimension (CD) control and less variation, butonly allows for a single gate length. One mask is used for the SADPprocess in an aspect of the present disclosure. The use of LELE providesfor multiple gate lengths and a flexible CPP within the same device. Theuse of LELE, in an aspect of the present disclosure, uses two masks. Thecut pattern for both SADP and LELE also uses a single mask, in an aspectof the present disclosure, which provides for a four mask process.

The use of SADP, in an aspect of the present disclosure, enables asmaller gate length at a smaller CPP. By combining SADP with LELE,multiple gate lengths at a smaller, possibly minimum CPP are enabled.Further, LELE also allows for larger gate lengths at a larger CPP forinput-output (I/O) and analog devices.

FIGS. 1A-1J illustrate side views of a semiconductor device inaccordance with one or more aspects of the present disclosure. In FIGS.1A-1J, the LELE process is generally shown. FIG. 1A illustrates asubstrate 100 with a layer 102 and a layer 108. The layers 102 and 108may be hard mask layers, layers of photoresist, or may be layers ofsilicon oxide, polysilicon, or other materials. A mask 104, with amasking area 106, is also shown in FIG. 1A. In FIG. 1B, the mask 104 isplaced proximate to the layer 102 and the substrate 100, in order topattern the layer 102.

FIG. 1C illustrates the layer 102 with areas 110 of the layer 102 thatwere not shielded by the masking area 106, and the area 112 that wasshielded by the masking area 106. FIGS. 1A-1C describe the “firstlithography” or “first litho” portion of the LELE process of the presentdisclosure. FIG. 1D illustrates a mesa 114, which may be part of thelayer 102, or may be part of another layer depending on the design ofthe overall device. FIG. 1D describes the “first etch” of the LELEprocess of the present disclosure.

FIG. 1E illustrates another layer 116, which may be photoresist, or maybe silicon, silicon oxide, polysilicon, or other materials. FIG. 1Fillustrates the mask 104, where an edge 118 of the masking area 106 isoffset from an edge 120 of the mesa 114. FIG. 1G illustrates theexposure of the layer 116, where an area 122 is shielded using themasking area 106, while areas 124 remain unshielded. FIG. 1H shows thearea 122 and the mesa 114 on the layer 108. FIGS. 1E-1H describe the“second lithography” portion of the LELE process of the presentdisclosure.

FIG. 1I illustrates etching or removal of portions of the layer 108, tocreate a mesa 128 and a mesa 130 that were underneath the mesa 114 andthe area 122. FIG. 1J illustrates etching the substrate 100, where themesas 128 and 130 act as a mask to protect portions of the substrate100. FIGS. 1H-1J describe the “second etch” portion of the LELE processof the present disclosure.

By positioning the masking area 106, the widths of the mesas 128 and130, and thus the features that are created on the substrate 100 orother layers in the device, are created by “interleaving” the maskingareas 106 between the first lithography and the second lithography inthe LELE process. The area 122 (which is defined by the masking area106), however, limits how close the mesa 130 can be to another mesa 128or another device, because the area 122 prevents any etching or otherprocessing from occurring underneath the area 122. This limits thegate-to-gate spacing of devices on the substrate 100. In other words,the LELE process may be performed in a first region and the SADP processmay be performed in a second region. Further, the LELE process may beperformed in between features or gates produced by the SADP process.

FIGS. 2A-2M illustrate a process to fabricate a semiconductor device inaccordance with one or more aspects of the present disclosure.

FIG. 2A illustrates the use of an SADP mask. A substrate 200 with hardmask layers 202 and 204 are shown, and a mandrel 206 is deposited on thehard mask layer 204. FIG. 2B illustrates the deposition of a spacerlayer 208 on the mandrel 206. FIG. 2C illustrates etching 210 of themandrel 206 and the hard mask layers 202 and 204. The spacer layer 208thickness define a gate length in the SADP process. FIG. 2D shows thespacer layer 208 and the hard mask layer 204 being removed, leaving agate length pattern 212 on the substrate 200. FIG. 2E shows depositionof a photoresist (PR) layer 214 and hard mask layers 216, 218. Thesecond mask is applied and the photoresist layer 214 is exposed orpatterned 220 in FIG. 2F, which is the first LELE pattern.

In the present disclosure, the SADP mask creates a pattern of firstgates in a first region of the substrate 200, and the LELE patterning isperformed in the first region of the substrate 200. As such, in anaspect of the present disclosure, the SADP devices and the LELE devicesmay be interleaved or adjacent to one another in the first region of thesubstrate 200.

Further, the SADP patterns in the first region create a first gatelength and a first contacted polysilicon pitch (CPP). The first CPP maybe smaller than a single pattern lithographic limit. The LELE patternsin the first region create a second gate length or a second CPP, wherethe second CPP is also smaller than the single pattern lithographiclimit. The second gate length may be different than the first gatelength. As an example, and not by way of limitation, the first andsecond CPP may range between 40 and 80 nanometers, while the first andsecond gate length may range between 10 and 30 nanometers.

FIG. 2G illustrates the hard mask layer removal by an etch 222. FIG. 2Hillustrates a second photoresist 224 application. FIG. 21 illustratesuse of a third mask, the second LELE pattern, which patterns the secondphotoresist 224. FIG. 2J illustrates an etch 226 of the hard mask layer216, to create a gate length pattern 228, based on the second LELEpattern. FIG. 2K illustrates another photoresist 230 deposition. FIG. 2Lshows the patterning of the cut mask. FIG. 2M illustrates the etching232 into the substrate 200 to create the gate length patterns 212 and228 into the substrate 200 in accordance with an aspect of the presentdisclosure.

FIG. 3A illustrates a side view of a semiconductor device in accordancewith one or more aspects of the present disclosure. An area 300 shows anSADP-patterned gate length 302 at a smaller pitch (CPP) 304, which hasimproved critical dimension uniformity and with less pitch variationbetween devices. An area 306 shows a LELE patterned gate length 308 at asecond pitch (CPP) 310, which may be a smaller CPP or the same CPP 310as in the area 300. An area 312 illustrates a larger gate length 314 ata larger pitch (CPP) 316, which may be made using the LELE processdescribed with respect to FIGS. 1A-1J.

FIG. 3B illustrates a side view of a semiconductor device in accordancewith one or more aspects of the present disclosure. Multiple devices areinitially formed with an SADP-patterned gate length 302 at a smallerpitch (CPP) 304. In FIG. 3C, an LELE cell swap is performed within thesame region or area on the substrate 100. In this aspect of thedisclosure, the LELE cell swap process is performed to fabricate a pairof LELE patterned devices with a LELE patterned gate length 308 that islarger than the SADP-patterned gate length 302. The pitch for the LELEpatterned gate length devices may be the same as the pitch 304.

FIG. 4 is a process flow diagram illustrating a method 400 forfabricating a device according to an aspect of the present disclosure.In block 402, at least a first gate having a first gate length and afirst contacted polysilicon pitch (CPP) is patterned with a firstlithography process. The first CPP is smaller than a single patternlithographic limit. For example, a first gate is patterned using SADP asshown in FIGS. 1A-1J. In block 404 a second gate having a second gatelength or a second CPP with a second lithography process is patterned.The second CPP is smaller than the single pattern lithographic limit andthe second gate length is different than the first gate length. Forexample, a second gate is patterned using the LELE process in FIGS.2A-2M.

According to a further aspect of the present disclosure, a semiconductorapparatus is described. In one configuration, the apparatus includesfirst means for selectively conducting current having a first gatelength and a first contacted polysilicon pitch (CPP). The first meansmay be a transistor made using a SADP process as described in area 300of FIG. 3. The apparatus also includes second means for selectivelyconducting current having at least one second gate length device havinga second gate length and a second CPP. The second means may be atransistor made using a LELE process as described in area 306 or area312 of FIG. 3. In another aspect, the aforementioned means may be anymodule or any apparatus configured to perform the functions recited bythe aforementioned means.

FIG. 5 is a block diagram showing an exemplary wireless communicationsystem 500 in which an aspect of the disclosure may be advantageouslyemployed. For purposes of illustration, FIG. 5 shows three remote units520, 530, and 550 and two base stations 540. It will be recognized thatwireless communication systems may have many more remote units and basestations. Remote units 520, 530, and 550 include IC devices 525A, 525C,and 525B that include the disclosed devices. It will be recognized thatother devices may also include the disclosed devices, such as the basestations, switching devices, and network equipment. FIG. 5 shows forwardlink signals 580 from the base station 540 to the remote units 520, 530,and 550 and reverse link signals 590 from the remote units 520, 530, and550 to base stations 540.

In FIG. 5, remote unit 520 is shown as a mobile telephone, remote unit530 is shown as a portable computer, and remote unit 550 is shown as afixed location remote unit in a wireless local loop system. For example,the remote units may be mobile phones, hand-held personal communicationsystems (PCS) units, portable data units such as personal dataassistants, GPS enabled devices, navigation devices, set top boxes,music players, video players, entertainment units, fixed location dataunits such as meter reading equipment, or other devices that store orretrieve data or computer instructions, or combinations thereof AlthoughFIG. 5 illustrates remote units according to the aspects of thedisclosure, the disclosure is not limited to these exemplary illustratedunits. Aspects of the disclosure may be suitably employed in manydevices, which include the disclosed devices.

FIG. 6 is a block diagram illustrating a design workstation used forcircuit, layout, and logic design of a semiconductor component, such asthe devices disclosed above. A design workstation 600 includes a harddisk 601 containing operating system software, support files, and designsoftware such as Cadence or OrCAD. The design workstation 600 alsoincludes a display 602 to facilitate design of a circuit 610 or asemiconductor component 612 such as a device in accordance with anaspect of the present disclosure. A storage medium 604 is provided fortangibly storing the design of the circuit 610 or the semiconductorcomponent 612. The design of the circuit 610 or the semiconductorcomponent 612 may be stored on the storage medium 604 in a file formatsuch as GDSII or GERBER. The storage medium 604 may be a CD-ROM, DVD,hard disk, flash memory, or other appropriate device. Furthermore, thedesign workstation 600 includes a drive apparatus 603 for acceptinginput from or writing output to the storage medium 604.

Data recorded on the storage medium 604 may specify logic circuitconfigurations, pattern data for photolithography masks, or mask patterndata for serial write tools such as electron beam lithography. The datamay further include logic verification data such as timing diagrams ornet circuits associated with logic simulations. Providing data on thestorage medium 604 facilitates the design of the circuit 610 or thesemiconductor component 612 by decreasing the number of processes fordesigning semiconductor wafers.

For a firmware and/or software implementation, the methodologies may beimplemented with modules (e.g., procedures, functions, and so on) thatperform the functions described herein. A machine-readable mediumtangibly embodying instructions may be used in implementing themethodologies described herein. For example, software codes may bestored in a memory and executed by a processor unit. Memory may beimplemented within the processor unit or external to the processor unit.As used herein, the term “memory” refers to types of long term, shortterm, volatile, nonvolatile, or other memory and is not to be limited toa particular type of memory or number of memories, or type of media uponwhich memory is stored.

If implemented in firmware and/or software, the functions may be storedas one or more instructions or code on a computer-readable medium.Examples include computer-readable media encoded with a data structureand computer-readable media encoded with a computer program.Computer-readable media includes physical computer storage media. Astorage medium may be an available medium that can be accessed by acomputer. By way of example, and not limitation, such computer-readablemedia can include RAM, ROM, EEPROM, CD-ROM or other optical diskstorage, magnetic disk storage or other magnetic storage devices, orother medium that can be used to store desired program code in the formof instructions or data structures and that can be accessed by acomputer; disk and disc, as used herein, includes compact disc (CD),laser disc, optical disc, digital versatile disc (DVD), floppy disk andBlu-ray disc where disks usually reproduce data magnetically, whilediscs reproduce data optically with lasers. Combinations of the aboveshould also be included within the scope of computer-readable media.

In addition to storage on computer readable medium, instructions and/ordata may be provided as signals on transmission media included in acommunication apparatus. For example, a communication apparatus mayinclude a transceiver having signals indicative of instructions anddata. The instructions and data are configured to cause one or moreprocessors to implement the functions outlined in the claims.

Although the present disclosure and its advantages have been describedin detail, it should be understood that various changes, substitutionsand alterations can be made herein without departing from the technologyof the disclosure as defined by the appended claims. For example,relational terms, such as “above” and “below” are used with respect to asubstrate or electronic device. Of course, if the substrate orelectronic device is inverted, above becomes below, and vice versa.Additionally, if oriented sideways, above and below may refer to sidesof a substrate or electronic device. Moreover, the scope of the presentapplication is not intended to be limited to the particularconfigurations of the process, machine, manufacture, composition ofmatter, means, methods and steps described in the specification. As oneof ordinary skill in the art will readily appreciate from thedisclosure, processes, machines, manufacture, compositions of matter,means, methods, or steps, presently existing or later to be developedthat perform substantially the same function or achieve substantiallythe same result as the corresponding configurations described herein maybe utilized according to the present disclosure. Accordingly, theappended claims are intended to include within their scope suchprocesses, machines, manufacture, compositions of matter, means,methods, or steps.

Those of skill would further appreciate that the various illustrativelogical blocks, modules, circuits, and algorithm steps described inconnection with the disclosure herein may be implemented as electronichardware, computer software, or combinations of both. To clearlyillustrate this interchangeability of hardware and software, variousillustrative components, blocks, modules, circuits, and steps have beendescribed above generally in terms of their functionality. Whether suchfunctionality is implemented as hardware or software depends upon theparticular application and design constraints imposed on the overallsystem. Skilled artisans may implement the described functionality invarying ways for each particular application, but such implementationdecisions should not be interpreted as causing a departure from thescope of the present disclosure.

The various illustrative logical blocks, modules, and circuits describedin connection with the disclosure herein may be implemented or performedwith a general-purpose processor, a digital signal processor (DSP), anapplication specific integrated circuit (ASIC), a field programmablegate array (FPGA) or other programmable logic device, discrete gate ortransistor logic, discrete hardware components, or any combinationthereof designed to perform the functions described herein. Ageneral-purpose processor may be a microprocessor, but in thealternative, the processor may be any conventional processor,controller, microcontroller, or state machine. A processor may also beimplemented as a combination of computing devices, e.g., a combinationof a DSP and a microprocessor, multiple microprocessors, one or moremicroprocessors in conjunction with a DSP core, or any other suchconfiguration.

The steps of a method or algorithm described in connection with thedisclosure may be embodied directly in hardware, in a software moduleexecuted by a processor, or in a combination of the two. A softwaremodule may reside in RAM, flash memory, ROM, EPROM, EEPROM, registers,hard disk, a removable disk, a CD-ROM, or any other form of storagemedium known in the art. An exemplary storage medium is coupled to theprocessor such that the processor can read information from, and writeinformation to, the storage medium. In the alternative, the storagemedium may be integral to the processor. The processor and the storagemedium may reside in an ASIC. The ASIC may reside in a user terminal. Inthe alternative, the processor and the storage medium may reside asdiscrete components in a user terminal

In one or more exemplary designs, the functions described may beimplemented in hardware, software, firmware, or any combination thereofIf implemented in software, the functions may be stored on ortransmitted over as one or more instructions or code on acomputer-readable medium. Computer-readable media includes both computerstorage media and communication media including any medium thatfacilitates transfer of a computer program from one place to another. Astorage media may be any available media that can be accessed by ageneral purpose or special purpose computer. By way of example, and notlimitation, such computer-readable media can include RAM, ROM, EEPROM,CD-ROM or other optical disk storage, magnetic disk storage or othermagnetic storage devices, or any other medium that can be used to carryor store specified program code means in the form of instructions ordata structures and that can be accessed by a general-purpose orspecial-purpose computer, or a general-purpose or special-purposeprocessor. Also, any connection is properly termed a computer-readablemedium. For example, if the software is transmitted from a website,server, or other remote source using a coaxial cable, fiber optic cable,twisted pair, digital subscriber line (DSL), or wireless technologiessuch as infrared, radio, and microwave, then the coaxial cable, fiberoptic cable, twisted pair, DSL, or wireless technologies such asinfrared, radio, and microwave are included in the definition of medium.Disk and disc, as used herein, includes compact disc (CD), laser disc,optical disc, digital versatile disc (DVD), floppy disk and Blu-ray discwhere disks usually reproduce data magnetically, while discs reproducedata optically with lasers. Combinations of the above should also beincluded within the scope of computer-readable media.

The previous description of the disclosure is provided to enable anyperson skilled in the art to make or use the disclosure. Variousmodifications to the disclosure will be readily apparent to thoseskilled in the art, and the generic principles defined herein may beapplied to other variations without departing from the spirit or scopeof the disclosure. Thus, the disclosure is not intended to be limited tothe examples and designs described herein but is to be accorded thewidest scope consistent with the principles and novel features disclosedherein.

What is claimed is:
 1. A method for fabricating a plurality of deviceson a die, comprising: patterning a first region to create at least afirst gate having a first gate length and a first contacted polysiliconpitch (CPP) with a first process, the first CPP being smaller than asingle pattern lithographic limit; and patterning the first region tocreate a second gate having a second gate length or a second CPP with asecond process, the second CPP being smaller than the single patternlithographic limit, the second gate length being different than thefirst gate length.
 2. The method of claim 1, in which the second CPP isdifferent from the first CPP.
 3. The method of claim 1, in which thefirst process is a self-aligned double patterning (SADP) process.
 4. Themethod of claim 3, in which the second process is alitho-etch-litho-etch (LELE) process.
 5. The method of claim 1, in whichthe first process is a first lithography process performed in a firstregion and the second process is a second lithography process performedin a second region.
 6. The method of claim 1, in which the secondprocess is a second lithography process performed in between gatesformed by the first process.
 7. The method of claim 1, in which theplurality of devices are integrated into a mobile phone, a set top box,a music player, a video player, an entertainment unit, a navigationdevice, a computer, a hand-held personal communication systems (PCS)unit, a portable data unit, and/or a fixed location data unit.
 8. Anapparatus, comprising: at least one first gate length device having afirst gate length and a first contacted polysilicon pitch (CPP) in afirst region, the first CPP being smaller than a single patternlithographic limit; and at least one second gate length device in thefirst region having a second gate length or a second CPP, the second CPPbeing smaller than the single pattern lithographic limit, the secondgate length being different than the first gate length.
 9. The apparatusof claim 8, in which the second CPP is different from the first CPP. 10.The apparatus of claim 8, in which the at least one first gate lengthdevice has a more uniform critical dimension uniformity than the atleast one second gate length device.
 11. The apparatus of claim 8, inwhich the at least one second gate length device further comprises athird gate length device having a third gate length.
 12. The apparatusof claim 8 integrated into a mobile phone, a set top box, a musicplayer, a video player, an entertainment unit, a navigation device, acomputer, a hand-held personal communication systems (PCS) unit, aportable data unit, and/or a fixed location data unit.
 13. An apparatus,comprising: first means for selectively conducting current having afirst gate length and a first contacted polysilicon pitch (CPP) in afirst region, the first CPP being smaller than a single patternlithographic limit; and second means for selectively conducting currenthaving at least one second gate length device having a second gatelength or a second CPP, the second CPP being smaller than the singlepattern lithographic limit, the second gate length being different thanthe first gate length.
 14. The apparatus of claim 13, in which thesecond CPP is different from the first CPP.
 15. The apparatus of claim13, in which the first means is created with a self-aligned doublepatterning (SADP) process.
 16. The apparatus of claim 13, in which thesecond means is created with a litho-etch-litho-etch (LELE) process. 17.The apparatus of claim 13 integrated into a mobile phone, a set top box,a music player, a video player, an entertainment unit, a navigationdevice, a computer, a hand-held personal communication systems (PCS)unit, a portable data unit, and/or a fixed location data unit.
 18. Amethod for fabricating a plurality of devices on a die, comprising: thestep of patterning a first region to create at least a first gate havinga first gate length and a first contacted polysilicon pitch (CPP) with afirst process, the first CPP being smaller than a single patternlithographic limit; and the step of patterning the first region tocreate a second gate having a second gate length or a second CPP with asecond process, the second CPP being smaller than the single patternlithographic limit, the second gate length being different than thefirst gate length.
 19. The method of claim 18, in which the second CPPis different from the first CPP.
 20. The method of claim 18, in whichthe plurality of devices are integrated into a mobile phone, a set topbox, a music player, a video player, an entertainment unit, a navigationdevice, a computer, a hand-held personal communication systems (PCS)unit, a portable data unit, and/or a fixed location data unit.